Nanofabrication of Functional Ceramics

The current trend of ceramic nanotechnology has§motivated an ever-increasing need to achieve§exquisite control over size, shape, and dimensional§confinement of functional oxide architectures, in an§equivalent manner realized for semiconductors.§However, the unique nature of ceramics poses major§challenges for most traditional nanofabrication§technologies, putting the development of innovative§oxide nanopatterning schemes under the spotlight.§This book discusses major challenges for ceramic§nanofabrication and reviews patterning methods that§are suitable for this unique materials family. Stress§is laid upon the variable pressure soft-electron beam§lithography (VP-soft-eBL). Examples of ceramic§nanopatterns prepared using VP-sof-eBL are presented,§along with the strategy employed to control their§microstructure and morphology. The reported work of§building and tailoring constrained ceramic§nanostructures lays the groundwork for in-depth§exploration in the rich phenomena related to§spatial/dimensional confinement. This study should be§useful to professionals or any reader interested in§ceramic nanotechnology, nanopatterning and§general materials science fields.