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In fiber optics systems there is an increasing need §for fast, compact switches. Currently employed opto-§electro-optical converters are relatively slow and §power demanding. Nonlinear optical devices can §provide fast, all-optical wavelength conversion. §However, existing devices (e.g., quasi-phasematched §lithium niobate or gallium arsenide waveguides) §either are bulky or require complex fabrication §processes. This book describes the design, §fabrication and characterization of aluminum gallium §arsenide (AlGaAs)/aluminum oxide (AlOx) nonlinear §waveguide and cavity devices. Because of the high §index contrast of the AlGaAs/AlOx material system, §phasematching can be achieved by artificial §birefringence. This approach greatly simplifies the §fabrication process, compared to quasi-phasematched §waveguides. Furthermore, by using sub-micron §waveguide confinement and resonant cavities, highly §efficient devices can be realized. This work should §be helpful to researchers and students involved in §the development of semiconductor integrated optical §devices, especially waveguide and cavity design, §fabrication and characterization of sub-wavelength §devices.